Dry cabinet for wafer storage
Dry cabinet for wafer storageWafer is the carrier used in the production of integrated circuits, mostly used in display lighting and LED industry. After polishing and slicing, the monocrystalline silicon rod becomes a crystal element. Crystal element is the most commonly used semiconductor material. Wafer manufacturing process is quite complex and rigorous, but it is the foundation of all electronic industries. The overall process of wafer manufacturing can be divided into wafer processing process (Wafer Fabrication), wafer needle testing process (Wafer Probe), construction process (Packaging), test process (Initial Test and Final Test) and other steps. The cost of wafer is very high, but it is easy to oxidize in ordinary environment, which causes great economic loss and bad products. We need to use nitrogen cabinet/Dry cabinet to store.
According to different packaging,Wafer storage needs different humidity values. Sealed wafers packs needs to be stored in a humidity of 25 RH±3 RH, open packages or exposed dies needs to be stored in a humidity environment below 5% RH. The temperature is 25℃±5℃ and the cleanliness grade is Class100-Class10 in the dust-free environment. NetDry nitrogen cabinet, using the original imported accessories, multi-point gas supply system, movable shelves, surrounded by gas convection spacing, so that nitrogen distribution inside N2 cabinet is uniform, more comprehensive protection.
When the wafer is stored in the nitrogen cabinet, the label should be made. Through the high-definition toughened glass window, the storage of the wafer is clear at a glance. Also NetDry N2 suppl Cabinet do a good job of storage and removal of wafer time and humidity or oxygen content value, a comprehensive understanding of wafer storage time and humidity in the nitrogen purge cabinet. USB or 232 communication protocols, single version software or TCP/IP protocols can be installed to view the temperature and humidity records of nitrogen cabinets in real time. Humidity alarm function, when humidity is not up to standard or artificially forget to close the cabinet door of nitrogen cabinet, through acousto-optic alarm to remind.